JPH0129571Y2 - - Google Patents
Info
- Publication number
- JPH0129571Y2 JPH0129571Y2 JP6522684U JP6522684U JPH0129571Y2 JP H0129571 Y2 JPH0129571 Y2 JP H0129571Y2 JP 6522684 U JP6522684 U JP 6522684U JP 6522684 U JP6522684 U JP 6522684U JP H0129571 Y2 JPH0129571 Y2 JP H0129571Y2
- Authority
- JP
- Japan
- Prior art keywords
- capillary column
- hole
- plate
- groove
- column groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 19
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 10
- 239000010703 silicon Substances 0.000 claims description 10
- 239000007789 gas Substances 0.000 description 15
- 239000012159 carrier gas Substances 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000007924 injection Substances 0.000 description 5
- 238000002347 injection Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 1
- 229910001854 alkali hydroxide Inorganic materials 0.000 description 1
- 150000008044 alkali metal hydroxides Chemical class 0.000 description 1
- 238000003965 capillary gas chromatography Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
Landscapes
- Treatment Of Liquids With Adsorbents In General (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6522684U JPS60176170U (ja) | 1984-05-02 | 1984-05-02 | 板状キヤピラリ−カラム用基板 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6522684U JPS60176170U (ja) | 1984-05-02 | 1984-05-02 | 板状キヤピラリ−カラム用基板 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60176170U JPS60176170U (ja) | 1985-11-21 |
| JPH0129571Y2 true JPH0129571Y2 (en]) | 1989-09-08 |
Family
ID=30597031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6522684U Granted JPS60176170U (ja) | 1984-05-02 | 1984-05-02 | 板状キヤピラリ−カラム用基板 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60176170U (en]) |
-
1984
- 1984-05-02 JP JP6522684U patent/JPS60176170U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60176170U (ja) | 1985-11-21 |
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